https://scholars.lib.ntu.edu.tw/handle/123456789/491384
Title: | Metal characterization and process enhancement techniques for photolithographic materials | Authors: | Ko, F.-H. Chen, H.-L. Hsu, C.-C. Chu, T.-C. HSUEN-LI CHEN |
Issue Date: | 2002 | Journal Volume: | 4689 II | Start page/Pages: | 696-705 | Source: | Proceedings of SPIE-The International Society for Optical Engineering | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/491384 | DOI: | 10.1117/12.473512 |
Appears in Collections: | 材料科學與工程學系 |
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