https://scholars.lib.ntu.edu.tw/handle/123456789/491401
Title: | A Fabry-Perot type anti-reflective coating for deep ultraviolet binary photomask application | Authors: | Chen, H.L. Hsu, C.K. Chen, B.C. Ko, F.H. Huang, T.Y. Chu, T.C. HSUEN-LI CHEN |
Issue Date: | 2001 | Journal Volume: | 4409 | Start page/Pages: | 372-381 | Source: | Proceedings of SPIE - The International Society for Optical Engineering | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/491401 | DOI: | 10.1117/12.438347 |
Appears in Collections: | 材料科學與工程學系 |
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