https://scholars.lib.ntu.edu.tw/handle/123456789/497251
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Chen, Y.-P. | en_US |
dc.contributor.author | Chen, C.-H. | en_US |
dc.contributor.author | Chang, J.-H. | en_US |
dc.contributor.author | Chiu, H.-C. | en_US |
dc.contributor.author | Chen, G.-Y. | en_US |
dc.contributor.author | Chiang, C.-H. | en_US |
dc.contributor.author | Chen, L.-S. | en_US |
dc.contributor.author | Tseng, C.-T. | en_US |
dc.contributor.author | Lee, C.-H. | en_US |
dc.contributor.author | Yen, J.-Y. | en_US |
dc.contributor.author | LON A. WANG | en_US |
dc.contributor.author | JIA-YUSH YEN | en_US |
dc.creator | Chen, Y.-P.;Chen, C.-H.;Chang, J.-H.;Chiu, H.-C.;Chen, G.-Y.;Chiang, C.-H.;Chen, L.-S.;Tseng, C.-T.;Lee, C.-H.;Yen, J.-Y.;Wang, L.A. | - |
dc.date.accessioned | 2020-06-04T07:50:44Z | - |
dc.date.available | 2020-06-04T07:50:44Z | - |
dc.date.issued | 2009 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/497251 | - |
dc.relation.ispartof | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | - |
dc.title | Stitching periodic submicron fringes by utilizing step-and-align interference lithography | en_US |
dc.type | conference paper | en |
dc.identifier.doi | 10.1116/1.3258152 | - |
dc.identifier.scopus | 2-s2.0-72849137288 | - |
dc.identifier.url | https://www.scopus.com/inward/record.uri?eid=2-s2.0-72849137288&doi=10.1116%2f1.3258152&partnerID=40&md5=007714ef4b43654e5601bde24a6dd391 | - |
dc.relation.pages | 2951-2957 | - |
dc.relation.journalvolume | 27 | - |
dc.relation.journalissue | 6 | - |
item.openairetype | conference paper | - |
item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
item.fulltext | no fulltext | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
crisitem.author.dept | Photonics and Optoelectronics | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.orcid | 0000-0001-8795-9211 | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
顯示於: | 電機工程學系 |
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