https://scholars.lib.ntu.edu.tw/handle/123456789/498832
Title: | A new process for liquid phase deposition of silicon oxide and its application in amorphous silicon thin film transisitor | Authors: | Chou, J.-S. Chen, M.-S. Lee, S.-C. SI-CHEN LEE |
Issue Date: | 1994 | Source: | 1994 International Electron Devices and Materials Symposium, EDMS 1994 | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/498832 | DOI: | 10.1109/EDMS.1994.863882 |
Appears in Collections: | 電機工程學系 |
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