https://scholars.lib.ntu.edu.tw/handle/123456789/501073
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Chen, C.C.P. | en_US |
dc.contributor.author | Gurhanli, A. | en_US |
dc.contributor.author | Chiang, T.-Y. | en_US |
dc.contributor.author | Hong, J.-J. | en_US |
dc.contributor.author | Melvin, L.S. | en_US |
dc.contributor.author | CHUNG-PING CHEN | en_US |
dc.date.accessioned | 2020-06-11T06:46:01Z | - |
dc.date.available | 2020-06-11T06:46:01Z | - |
dc.date.issued | 2008 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/501073 | - |
dc.relation.ispartof | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | - |
dc.title | Abbe singular-value decomposition: Compact Abbe's kernel generation for microlithography aerial image simulation using singular-value decomposition method | en_US |
dc.type | journal article | en |
dc.identifier.doi | 10.1116/1.3013310 | - |
dc.identifier.scopus | 2-s2.0-57249103665 | - |
dc.identifier.url | https://www.scopus.com/inward/record.uri?eid=2-s2.0-57249103665&doi=10.1116%2f1.3013310&partnerID=40&md5=169c460990a43e8298054f10e0dbfdd4 | - |
dc.relation.pages | 2322-2330 | - |
dc.relation.journalvolume | 26 | - |
dc.relation.journalissue | 6 | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.openairetype | journal article | - |
item.grantfulltext | none | - |
crisitem.author.dept | Electronics Engineering | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Center for Artificial Intelligence and Advanced Robotics | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
顯示於: | 電機工程學系 |
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