https://scholars.lib.ntu.edu.tw/handle/123456789/503283
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Das, D. | en_US |
dc.contributor.author | Raha, D. | en_US |
dc.contributor.author | Chen, W.-C. | en_US |
dc.contributor.author | Chen, K.-H. | en_US |
dc.contributor.author | Wu, C.-T. | en_US |
dc.contributor.author | Chen, L.-C. | en_US |
dc.creator | Chen, L.-C.;Wu, C.-T.;Chen, K.-H.;Chen, W.-C.;Raha, D.;Das, D. | - |
dc.date.accessioned | 2020-06-18T06:10:07Z | - |
dc.date.available | 2020-06-18T06:10:07Z | - |
dc.date.issued | 2012 | - |
dc.identifier.issn | 08842914 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/503283 | - |
dc.publisher | Cambridge University Press | - |
dc.relation.ispartof | Journal of Materials Research | - |
dc.title | Effect of substrate bias on the promotion of nanocrystalline silicon growth from He-diluted SiH 4 plasma at low temperature | en_US |
dc.type | journal article | en |
dc.identifier.doi | 10.1557/jmr.2012.4 | - |
dc.relation.pages | 1303-1313 | - |
dc.relation.journalvolume | 27 | - |
dc.relation.journalissue | 9 | - |
item.fulltext | no fulltext | - |
item.openairetype | journal article | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
crisitem.author.dept | Center for Condensed Matter Sciences | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
顯示於: | 凝態科學研究中心 |
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