https://scholars.lib.ntu.edu.tw/handle/123456789/555619
Title: | 氮化處理與介面工程於高介電材料金氧半元件之探討 | Authors: | 王晉億 黃芝傑 陳敏璋 |
Issue Date: | 2017 | Publisher: | 財團法人國家實驗研究院台灣半導體研究中心 | Journal Volume: | 24 | Journal Issue: | 3 | Start page/Pages: | 2月7日 | Source: | 國家奈米元件實驗室奈米通訊 | URI: | https://www.AiritiLibrary.com/Publication/Index/1029502x-201709-201710230008-201710230008-2-7 https://scholars.lib.ntu.edu.tw/handle/123456789/555619 |
ISSN: | 1029-502x |
Appears in Collections: | 材料科學與工程學系 |
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