https://scholars.lib.ntu.edu.tw/handle/123456789/586248
Title: | Parameters Analysis of Chemical Mechanical Polishing: An Investigation based on the Pattern Planarization Model | Authors: | DAR-ZEN CHEN Lee, Bor-Shin |
Issue Date: | 1999 | Journal Volume: | 146 | Journal Issue: | 9 | Start page/Pages: | 3420-3424 | Source: | Journal of the Electrochemical Society | URI: | http://jes.ecsdl.org/content/146/2/744.full.pdf https://scholars.lib.ntu.edu.tw/handle/123456789/586248 |
Appears in Collections: | 機械工程學系 |
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