https://scholars.lib.ntu.edu.tw/handle/123456789/587664
Title: | Enhancement of Through Silicon VIA Sidewall Quality by Nanosecond Laser Pulses with Chemical Etching Process | Authors: | Tang, C.W. Tseng, S.C. Young, H.T. Li, K.M. Yang, M. Liao, H.C. HONG-TSU YOUNG |
Issue Date: | 2012 | Source: | Advanced Materials Research | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/587664 |
Appears in Collections: | 機械工程學系 |
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