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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
Enhancement of Through Silicon VIA Sidewall Quality by Nanosecond Laser Pulses with Chemical Etching Process
Details
Enhancement of Through Silicon VIA Sidewall Quality by Nanosecond Laser Pulses with Chemical Etching Process
Journal
Advanced Materials Research
Date Issued
2012
Author(s)
Tang, C.W.
Tseng, S.C.
Young, H.T.
Li, K.M.
Yang, M.
Liao, H.C.
HONG-TSU YOUNG
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/587664
Type
journal article