https://scholars.lib.ntu.edu.tw/handle/123456789/589763
Title: | A Monolithic Six Degrees-of-freedom Piezo-Micro-Positioner with Nanometer Resolution | Authors: | Su, C.C. Liu, Tyng Tsai, C.L. Chang, S.H. TYNG LIU |
Issue Date: | 2011 | Source: | The 13th World Congress in Mechanism and Machine Science | Description: | Guanajuato, México |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/589763 |
Appears in Collections: | 機械工程學系 |
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