https://scholars.lib.ntu.edu.tw/handle/123456789/590834
Title: | Design of void-based photonic crystal EUV mirror, supplementary zones-surrounded Fresnel lens, and EUV inspection system | Authors: | Jia-Han Li* JIA-HAN LI |
Issue Date: | 2019 | Source: | 2019 International EUVL Workshop in Taiwan | URI: | http://140.127.232.76/file/20190516_jiahanli.pdf https://scholars.lib.ntu.edu.tw/handle/123456789/590834 |
Appears in Collections: | 工程科學及海洋工程學系 |
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