https://scholars.lib.ntu.edu.tw/handle/123456789/611930
標題: | Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage | 作者: | Hsieh T.H. Jywe W.Y. Chen S.L. Liu C.H. Huang H.L. Wen-Yuh Jywe |
關鍵字: | High resolution;Measurement time;Precision stage;Six degrees of freedom;Vibrometers | 公開日期: | 2011 | 卷: | 82 | 期: | 5 | 來源出版物: | Review of Scientific Instruments | 摘要: | A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is 30 nm200 nm and 0.04 arcsec0.1 arcsec at 1000 Hz. ? 2011 American Institute of Physics. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-79958050050&doi=10.1063%2f1.3585021&partnerID=40&md5=d8d4865ecf2802526a2d6e9a791c8d18 https://scholars.lib.ntu.edu.tw/handle/123456789/611930 |
DOI: | 10.1063/1.3585021 |
顯示於: | 機械工程學系 |
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