Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage
Journal
Review of Scientific Instruments
Journal Volume
82
Journal Issue
5
Date Issued
2011
Author(s)
Abstract
A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is 30 nm200 nm and 0.04 arcsec0.1 arcsec at 1000 Hz. ? 2011 American Institute of Physics.
Subjects
High resolution
Measurement time
Precision stage
Six degrees of freedom
Vibrometers
SDGs
Type
journal article