https://scholars.lib.ntu.edu.tw/handle/123456789/611977
標題: | A novel simple and low cost 4-DOF angular indexing calibrating techniques for high precision rotary table | 作者: | Chen C.-J. Jywe W. Teng Y.-F. Liu C.-H. Wen-Yuh Jywe |
關鍵字: | Calibrating techniques;Laser interferometers;Rotary tables;Calibration;Cost effectiveness;Costs;Indexing (materials working);Interferometry;Laser applications;Rotating machinery | 公開日期: | 2006 | 卷: | 2006 | 來源出版物: | Proceedings of 8th Biennial ASME Conference on Engineering Systems Design and Analysis, ESDA2006 | 摘要: | For calibrating an angular rotary table, either a high precision standard table or a laser interferometer and related optics are normally employed at high cost. This paper establishes a novel, simple and low cost technique to calibrate a 4-degrees-of-freedom errors of a rotary table (three angular motion errors and one displacement error) for a 360° full circle by employing one reference rotary table, one ID grating and two 2D(2 dimensional) position- sensing-detectors. With this technique, no highly accurate reference table with good repeatability is needed. After two full circle tests, the 4 DOF errors of the target rotary table and the reference table can be calculated respectively. The angular uncertainty of the measurement system can be less than 1.5 arc sec, while the displacement uncertainty can be up to 1.5 μm. Copyright ? 2006 by ASME. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-33845741181&partnerID=40&md5=21844eb93423ffc9e8393f2bf12beb5e https://scholars.lib.ntu.edu.tw/handle/123456789/611977 |
顯示於: | 機械工程學系 |
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