A novel simple and low cost 4-DOF angular indexing calibrating techniques for high precision rotary table
Journal
Proceedings of 8th Biennial ASME Conference on Engineering Systems Design and Analysis, ESDA2006
Journal Volume
2006
Date Issued
2006
Author(s)
Abstract
For calibrating an angular rotary table, either a high precision standard table or a laser interferometer and related optics are normally employed at high cost. This paper establishes a novel, simple and low cost technique to calibrate a 4-degrees-of-freedom errors of a rotary table (three angular motion errors and one displacement error) for a 360° full circle by employing one reference rotary table, one ID grating and two 2D(2 dimensional) position- sensing-detectors. With this technique, no highly accurate reference table with good repeatability is needed. After two full circle tests, the 4 DOF errors of the target rotary table and the reference table can be calculated respectively. The angular uncertainty of the measurement system can be less than 1.5 arc sec, while the displacement uncertainty can be up to 1.5 μm. Copyright ? 2006 by ASME.
Subjects
Calibrating techniques
Laser interferometers
Rotary tables
Calibration
Cost effectiveness
Costs
Indexing (materials working)
Interferometry
Laser applications
Rotating machinery
Type
conference paper