https://scholars.lib.ntu.edu.tw/handle/123456789/625276
標題: | A novel fabrication method and optimum tooling design for microlens arrays | 作者: | Shen Y.-K Chang C.-Y Shen Y.-S SEN-YEU YANG |
關鍵字: | Deep reactive ion etching; Electroforming; Imprint lithography; Micro-hot embossing; Microlenses; Replication | 公開日期: | 2006 | 卷: | 5 | 起(迄)頁: | 2571-2575 | 來源出版物: | Annual Technical Conference - ANTEC, Conference Proceedings | 摘要: | This study uses a simple and novel procedure for microlens arrays. The master is formed by room temperature imprint lithography and thermal reflow process. The electroforming is used to fabricate the metal mold insert from master. Finally, micro-hot embossing is used to replicate microlens arrays. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-33745628077&partnerID=40&md5=bbe74851b35921190add9fec640e72c3 https://scholars.lib.ntu.edu.tw/handle/123456789/625276 |
SDG/關鍵字: | Arrays; Electroforming; Injection molding; Nanotechnology; Photolithography; Reactive ion etching; Deep reactive ion etching; Imprint lithography; Micro-hot embossing; Replication; Microlenses |
顯示於: | 機械工程學系 |
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