A novel fabrication method and optimum tooling design for microlens arrays
Journal
Annual Technical Conference - ANTEC, Conference Proceedings
Journal Volume
5
Pages
2571-2575
Date Issued
2006
Author(s)
Abstract
This study uses a simple and novel procedure for microlens arrays. The master is formed by room temperature imprint lithography and thermal reflow process. The electroforming is used to fabricate the metal mold insert from master. Finally, micro-hot embossing is used to replicate microlens arrays.
Subjects
Deep reactive ion etching; Electroforming; Imprint lithography; Micro-hot embossing; Microlenses; Replication
Other Subjects
Arrays; Electroforming; Injection molding; Nanotechnology; Photolithography; Reactive ion etching; Deep reactive ion etching; Imprint lithography; Micro-hot embossing; Replication; Microlenses
Type
conference paper