https://scholars.lib.ntu.edu.tw/handle/123456789/64137
Title: | Macromodeling of Coupled-Domain MEMS Devices with Electrostatic and Electrothermal Actuations | Authors: | Yang, Y.-J. Cheng, S.-Y. Shen, K.-Y. YangYJ |
Issue Date: | 2004 | Start page/Pages: | 1190-1196 | Source: | Journal of Micromechanics and Microengineering | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/85998 |
Appears in Collections: | 機械工程學系 |
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