https://scholars.lib.ntu.edu.tw/handle/123456789/68263
Title: | Computational Study of the Effect of Finger Width and Aspect Ratios for the Electrostatic Levitating Force of MEMS Combdrive | Authors: | Liao, Y.S. Chyuan, S,W. Chen, J.T. LiaoYS |
Issue Date: | 2005 | Journal Volume: | 14 | Journal Issue: | 2 | Start page/Pages: | 305-312 | Source: | Journal of Microelectromechanical Systems | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/86977 |
Appears in Collections: | 機械工程學系 |
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