https://scholars.lib.ntu.edu.tw/handle/123456789/70010
Title: | Interfacial Reactions of r.f-Sputtered TiNi Thin Film on (100) Silicon with SiN Diffusion-Barrier | Authors: | Wu, S.K. Su, J.J. Wang, J.Y. |
Issue Date: | Dec-2004 | Journal Issue: | 84 | Start page/Pages: | 1209-1218 | Source: | Philosophical Magazine A | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/222114 |
Appears in Collections: | 機械工程學系 |
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