https://scholars.lib.ntu.edu.tw/handle/123456789/70116
Title: | A high precision focus probe for the quality assessment of grating pitch | Authors: | Chen, Yejin Fan, K. C. Liu, Yusheng Cheng, Fang |
Journal Issue: | 339 | Start page/Pages: | 200-205 | Source: | Key Engineering Material | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/222131 |
Appears in Collections: | 機械工程學系 |
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