https://scholars.lib.ntu.edu.tw/handle/123456789/74978
Title: | The affinity of Si?N and Si?C bonding in amorphous silicon carbon nitride (a-SiCN) thin film | Authors: | Chen, C.W. Huang, C.C. Lin, Y.Y. Chen, L.C. Chen, K.H. |
Issue Date: | 2005 | Journal Issue: | 14 | Start page/Pages: | 1126-1130 | Source: | Diamond and Related Materials | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/95586 |
Appears in Collections: | 材料科學與工程學系 |
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