https://scholars.lib.ntu.edu.tw/handle/123456789/79817
Title: | Novel Method for In-Situ Monitoring of Thickness of Silicon Wafer during Wet Etching | Authors: | Lee, Chi-Yuan Chang, Pei-Zen Chen, Yung-Yu Dai, Ching-Liang Wang, Xuan-Yu Chen, Ping-Hei Lee, Shuo-Jen |
Issue Date: | May-2006 | Journal Volume: | 18 | Journal Issue: | 2 | Start page/Pages: | 71-82 | Source: | Sensors and Materials | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/106996 |
Appears in Collections: | 應用力學研究所 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.