https://scholars.lib.ntu.edu.tw/handle/123456789/82607
Title: | Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film | Authors: | Lee, B S Lin, S C Wu, W J Wang, X Y Chang, P Z WEN-JONG WU CHIH-KUNG LEE PEI-ZEN CHANG |
Issue Date: | May-2009 | Start page/Pages: | 65014 | Source: | Journal of Micromechanics and Microengineering | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/218170 | DOI: | 10.1088/0960-1317/19/6/065014 |
Appears in Collections: | 應用力學研究所 |
File | Description | Size | Format | |
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Piezoelectric MEMS generators fabricated with+an aerosol deposition PZT thin film.pdf | 1.11 MB | Adobe PDF | View/Open |
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