公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
---|---|---|---|---|---|---|
2001 | Ultra-deep LIGA process and its applications | Cheng, Y; Cheng, Y.; Shewa, B. -Y.; Shew, BY; Chyu, MK; Chyu, M. K.; Chen, PH; Chen, P. H. | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 467-468: 1192-1197 |