Issue Date | Title | Author(s) | Source | scopus | WOS | Fulltext/Archive link |
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2009 | Using transmission line theory to calculate equivalent refractive index of EUV mask multilayer structures for efficient scattering simulation by finite-difference time-domain method | Yen-Min Lee; Jia-Han Li; Philip C. W. Ng; Ting-Han Pei; Fu-Min Wang; Kuen-Yu Tsai; KUEN-YU TSAI ; JIA-HAN LI | Lithography Asia 2009, Proc. SPIE | 0 | 0 |