Issue Date | Title | Author(s) | Source | scopus | WOS | Fulltext/Archive link |
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2009 | Vertical electrothermal actuator with separated metal and nitride structural layers | Tsai, J.-C.; Lai, R.-J.; Yin, C.-Y.; Chen, D.-S.; Shen, C.-K.; Chang, Y.-T.; JUI-CHE TSAI | Journal of Micro/Nanolithography, MEMS, and MOEMS | 3 | 2 |