Issue Date | Title | Author(s) | Source | scopus | WOS | Fulltext/Archive link |
---|---|---|---|---|---|---|
2003 | Application of soft landing to the process control of chemical mechanical polishing | Chiu, Jian-Bin; Yu, Cheng-Ching; Shen, Shih-Haur | Microelectronic Engineering | |||
2003 | A pplication of soft landing to the process control of chemical mechanical polishing | Chiu, Jian-Bin; Yu, Cheng-Ching; Shen, Shih-Haur | Microelectronic Engineering 65(2003), 345–356 |