公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
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2001 | Modeling gas damping and spring phenomena in MEMS with frequency dependent macro-models | Yang, Yao-Joe ; Kamon, Mattan; Rabinovich, V.L.; Ghaddar, Chahid; Deshpande, Manish; Greiner, Ken; Gilbert, J.R. | The 14th IEEE International Conference on Micro Electro Mechanical Systems | 0 | 0 |