Issue Date | Title | Author(s) | Source | scopus | WOS | Fulltext/Archive link |
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1999 | Modeling and optimization of wafer-level spatial uniformity with the use of rational subgrouping | CHEE-WEE LIU ; Guo, Ruey-Shan; Chen, Argon; Liu, Cheewee; Lin, A.; Lan, M.; CHEE-WEE LIU | IEEE International Symposium on Semiconductor Manufacturing Conference |