公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
---|---|---|---|---|---|---|
2005 | A Novel Method for In-Situ Monitoring of the Thickness of a Silicon Wafer during Wet Etching | Lee, Chi Yuan; Chang, Pei Zen ; Chen, Yung Yu; Dai, Ching Liang; Wang, Xuan Yu; Chen, Ping Hei; Lee, Shuo Jen | Sensors and Materials |