Issue Date | Title | Author(s) | Source | scopus | WOS | Fulltext/Archive link |
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2005 | Novel Method for In-situ Monitoring of Thickness of Quartz during Wet Etching | Lee, C. Y.; Cheng, Y. C.; Wu, T. T.; Chen, Y. Y.; Chen, W. J.; Pao, S. Y.; Chang, P. Z.; Chen, Ping Hei | Japanese Journal of Applied Physics |