碳化矽化合物半導體晶圓之背晶研磨拋光與金屬化研究

Project title

碳化矽化合物半導體晶圓之背晶研磨拋光與金屬化研究

Internal ID

112AO03A

Principal Investigator

TUNG-HAN CHUANG

Start Date

January 1, 2023

End Date

December 31, 2023

Organizations

Materials Science and Engineering

Partner Organizations

Hsinchu Science Park Bureau, NSTC