Low-dielectric constant bisbenzo(cyclobutene) and fluorinated poly(arylene)ether films as bottom anti-reflective coating layers for ArF lithography

Journal

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Journal Volume

19

Journal Issue

6

Pages

2381-2384

Date Issued

2001

Author(s)

Chen, H.L.

Chu, T.C.

Li, M.Y.

Ko, F.H.

Cheng, H.C.

Huang, T.Y.

DOI

URI

URL

Type

journal article