Structural and photoluminescence properties of ZnO films grown on 6H-SiC substrates by low-temperature atomic layer deposition

Journal

Journal of the Electrochemical Society

Journal Volume

158

Journal Issue

12

Date Issued

2011

Author(s)

Lin, M.-C.

Wu, M.-K.

Yuan, K.-Y.

Chen, M.-J.

Yang, J.-R.

DOI

10.1149/2.031112jes

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/491579

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-81355163411&doi=10.1149%2f2.031112jes&partnerID=40&md5=b9874bfad42cac7e422e9a2508ff1cba

Type

journal article