In-situ scanning white light interferometry employing dual-sensing configuration and active fringe-locking strategy

Journal

International Journal of Nanomanufacturing

Journal Volume

8

Journal Issue

1-2

Pages

40-53

Date Issued

2012

Author(s)

Chen, L.-C.

Yeh, S.-L.

Tapilouw, A.M.

Lee, K.-F.

LIANG-CHIA CHEN

DOI

10.1504/IJNM.2012.044654

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447858

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84863138759&doi=10.1504%2fIJNM.2012.044654&partnerID=40&md5=aa3d4da182486359a42706814c24de5f

Type

journal article