In-situ scanning white light interferometry employing dual-sensing configuration and active fringe-locking strategy
Journal
International Journal of Nanomanufacturing
Journal Volume
8
Journal Issue
1-2
Pages
40-53
Date Issued
2012
Author(s)
Abstract
This article presents new white light interferometry with vibration-resistant capability achieved by in-situ optical detection and closed-loop feedback strategies. Scanning white light interferometry (SWLI) has become a popular measurement method due to its long measurement range and high measurement accuracy. However, the drawback of in-situ interferometry lies mainly in unacceptable measurement errors caused by environmental disturbance such as mechanical vibration and acoustic noise. This paper describes a method employing dual-sensing configuration and active fringe-locking strategy to overcome the issue. A specially designed band-pass filter is employed to generate a high-coherent light field for real-time detecting vibratory displacement. As proven by the experimental results, the maximum measurement error caused by vibration can be effectively reduced by more than six folds.
Type
journal article