Skip to main content
English
中文
Log In
Log in
Log in with ORCID
NTU Single Sign On
Have you forgotten your password?
Home
College of Electrical Engineering and Computer Science / 電機資訊學院
Electronics Engineering / 電子工程學研究所
Simultaneous flare level and flare variation minimization with dummification in EUVL
Details
Simultaneous flare level and flare variation minimization with dummification in EUVL
Journal
Design Automation Conference
Pages
1179-1184
Date Issued
2012
Author(s)
Fang, S.-Y.
YAO-WEN CHANG
DOI
10.1145/2228360.2228578
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-84863558338&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/372702
Type
conference paper
