A method using V-grooves to monitor the thickness of silicon membrane with μm resolution

Journal

Journal of Micromechanics and Microengineering

Journal Volume

8

Journal Issue

3

Pages

182-187

Date Issued

1998

Author(s)

Chang, P.-Z.

Yang, L.-J.

DOI

10.1088/0960-1317/8/3/002

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/486866

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0032166241&doi=10.1088%2f0960-1317%2f8%2f3%2f002&partnerID=40&md5=366b13e5020b3f3ae9724554bb148cac

Type

journal article