The effect of patterned susceptor on the thickness uniformity of rapid thermal oxides
Journal
IEEE Transactions on Semiconductor Manufacturing
Journal Volume
12
Journal Issue
3
Pages
340-344
Date Issued
1999
Author(s)
Lee, K.-C.
Chang, H.-Y.
Chang, H.
Hwu, J.-G.
Wung, T.-S.
JENN-GWO HWU
Type
journal article