Pre-oxidation of AlN substrates for subsequent metallization

Journal

Journal of Materials Science: Materials in Electronics

Journal Volume

26

Journal Issue

8

Pages

5910-5916

Date Issued

2015

Author(s)

Yeh, C.-T.

Tuan, W.-H.

DOI

10.1007/s10854-015-3160-7

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/492162

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84937519178&doi=10.1007%2fs10854-015-3160-7&partnerID=40&md5=cda36d13473a2478da87e58f0c303c0b

Type

journal article