Directly patterning metal films by nanoimprint lithography with low-temperature and low-pressure
Journal
Microelectronic Engineering
Journal Volume
83
Journal Issue
4-9 SPEC. ISS.
Pages
893-896
Date Issued
2006
Author(s)
Chen, H.L.
Chuang, S.Y.
Cheng, H.C.
Lin, C.H.
Chu, T.C.
HSUEN-LI CHEN
Type
journal article