Ultra-deep LIGA process and its applications
Journal
Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Journal Volume
467-468
Journal Issue
PART II
Pages
1192-1197
Date Issued
2001
Author(s)
Abstract
Deep X-ray lithography developed in Germany around the 1980s is an important micromachining technology. Combined with electroplating and molding, this technology can produce micromachining parts with low cost and flexible choices of material. The ultra-deep (UD) LIGA process developed at the Synchrotron Radiation Research Center (SRRC) that provides better development of photoresist is capable of producing microstructures of millimeters in size. The ongoing micromachining projects at SRRC benefited from this UD LIGA process include: microfiber spinneret, leadframe punch, and w-band klystrino. © 2001 Elsevier Science B.V. All rights reserved.
SDGs
Type
journal article