Ultra-deep LIGA process and its applications

Journal

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Journal Volume

467-468

Journal Issue

PART II

Pages

1192-1197

Date Issued

2001

Author(s)

Cheng, Y.

Shew, B.-Y.

Chyu, M.K.

Chen, P.H.

DOI

URI

Type

journal article