Deposition of (111)-oriented Ag nano-twinned film on (111) Si wafer
Journal
Proceedings of the World Congress on Mechanical, Chemical, and Material Engineering
Pages
1-7
Date Issued
2020
Author(s)
Abstract
The special coincidence twin boundary has many advantageous effects for structural and electronic materials. In this study, nano-twinned Ag films with a strong (111) preferred orientation were sputtered on (111) Si substrates with and without a Ti adhesive layer. The proportion of Σ3 twin boundaries to the total grain boundaries was 47.2%. The addition of a Ti adhesive layer with a thickness of 0.1 μm can effectively reduce the peeling failure of nano-twinned Ag film on (111) Si substrate. ? 2020, Avestia Publishing. All rights reserved.
SDGs
Type
conference paper