Line stitching in servo-assisted electron beam lithography system

Journal

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM

Pages

397-402

Date Issued

2011

Author(s)

Yen, J.-Y.

Chen, L.-S.

Chiu, P.

DOI

10.1109/AIM.2011.6027026

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-80053979240&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/362678

SDGs

[SDGs]SDG14

Type

conference paper