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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
A study of the characteristics of the diamond dresser in the CMP process
Details
A study of the characteristics of the diamond dresser in the CMP process
Journal
Key engineering materials
Journal Volume
257-258
Pages
274-280
Date Issued
2004
Author(s)
Y.S. Liao
P.W. Hong
C.T. Yang
YUNN-SHIUAN LIAO
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/589599
Type
journal article
