Fabrication of diamond conditioners by using a micro patterning and electroforming approach

Journal

Microelectronic Engineering

Journal Volume

103

Pages

92-98

Date Issued

2013

Author(s)

Shih, C.-J.

Lin, W.-C.

Lin, C.-S.

Ou, S.-F.

Pan, Y.-N.

DOI

10.1016/j.mee.2012.08.015

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/491037

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84869885339&doi=10.1016%2fj.mee.2012.08.015&partnerID=40&md5=20b4c6f560d363c974ddd8b766fb1139

Type

journal article