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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
A Novel Fabrication Method for Suspended High-Aspect-Ratio MEMS Structures
Details
A Novel Fabrication Method for Suspended High-Aspect-Ratio MEMS Structures
Journal
Journal of Micromechanics and Microengineering (JMM)
Journal Volume
15
Pages
2184-2193
Date Issued
2005
Author(s)
Y.-J. Yang
W.-C. Kuo
YAO-JOE YANG
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/587754
Type
journal article
