A MEMS bistable device with push-on-push-off capability

Journal

Journal of Microelectromechanical Systems

Journal Volume

22

Journal Issue

1

Pages

7-9

Date Issued

2013

Author(s)

Huang, H.-W.

Yang, Y.-J.

DOI

10.1109/JMEMS.2012.2228165

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448485

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84873304308&doi=10.1109%2fJMEMS.2012.2228165&partnerID=40&md5=f2886188d296df9bae53755d8cc6c3e7

Type

journal article